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Gas-based chemicals: winter masks problem

โœ Scribed by GREEK, BRUCE F.; FALLWELL, WILLIAM F.


Book ID
126418086
Publisher
American Chemical Society
Year
1977
Tongue
English
Weight
745 KB
Volume
55
Category
Article
ISSN
0009-2347

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Chemical gas etching of InP-based struct
โœ I. Maximov; S. Jeppesen; L. Montelius; L. Samuelson ๐Ÿ“‚ Article ๐Ÿ“… 1997 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 220 KB

In this paper we present our results on chemical gas etching (CGE) of InP-based structures using C12 as an etch gas. Structures are patterned using electron beam lithography and lift-off technique, 100 A Cr serving as an etch mask. Both etching rate and surface morphology of InP etched in CGE are in