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Garnett's theory and the optical constants of metal-oxide films

โœ Scribed by A. F. Perveev; N. P. Frolova

Book ID
104841778
Publisher
Springer US
Year
1977
Tongue
English
Weight
208 KB
Volume
27
Category
Article
ISSN
0021-9037

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Effect of process parameters on the opti
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In this study, we show that the optical constants of sputter-deposited chromium depend on the argon pressure used for the deposition. Higher argon pressure gives lower extinction coefficients. Sheet resistance measurements show that those materials with lower extinction coefficients also have lower