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Gallium arsenide processing—state of the manufacturing art

✍ Scribed by Alan Webb


Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
91 KB
Volume
40
Category
Article
ISSN
0042-207X

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The epitaxial growth of gallium arsenide
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The thermal decomposition of triethylarsine (TEAS) has been studied. It decomposes at a lower temperature than arsine (AsH3). The decomposition proceeds via a radical process at a temperature above 700°C. Epitaxial growth using TEAs has been investigated. A gallium arsenide (GaAs) layer with good mo