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GaAs surface cleaning by low-energy hydrogen ion bombardment at moderate temperatures

✍ Scribed by Schubert, E.; Razek, N.; Frost, F.; Schindler, A.; Rauschenbach, B.


Book ID
120698397
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
393 KB
Volume
97
Category
Article
ISSN
0021-8979

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