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GaAs integrated microwave circuits

โœ Scribed by Mehal, E.W.; Wacker, R.W.


Book ID
114589396
Publisher
IEEE
Year
1968
Tongue
English
Weight
831 KB
Volume
15
Category
Article
ISSN
0018-9383

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GaAs Integrated Microwave Circuits
โœ Mehal, E.W.; Wacker, R.W. ๐Ÿ“‚ Article ๐Ÿ“… 1968 ๐Ÿ› IEEE ๐ŸŒ English โš– 844 KB
Process-induced defects in manufacture o
โœ R.K. Purohit; G.C. Dubey; S. Dayal; R. Gulati; V.R. Balakrishnan; Koteshwar Rao; ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 304 KB

Semi-insulating liquid-incapsulated Czochralski GaAs wafers are generally used as substrates for the fabrication of monolithic microwave integrated circuits. In the fabrication process, the wafer is subjected to temperature cycling during the various stages of processing, namely post-ion implantatio