High-precision position control has been widely used in scientific instruments and semiconductor fabrication equipment. Traditionally, controllable displacements with sub-micron and nano-level resolution are usually achieved by piezoelectric actuators because of their high bandwidth and ease of cont
โฆ LIBER โฆ
Fuzzy sliding mode position control of a ball screw driven by pneumatic servomotor
โ Scribed by Ming-Chang Shin; Ching-Sham Lu
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 453 KB
- Volume
- 5
- Category
- Article
- ISSN
- 0957-4158
No coin nor oath required. For personal study only.
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This study analyzes the chaotic behavior of a micromechanical resonator with electrostatic forces on both sides and investigates the control of chaos. A phase portrait, maximum Lyapunov exponent and bifurcation diagram are used to find the chaotic dynamics of this micro-electro-mechanical system (ME