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Further improvement in high crystalline quality of homoepitaxial CVD diamond

✍ Scribed by Miyatake, H.; Arima, K.; Maida, O.; Teraji, T.; Ito, T.


Book ID
121701428
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
752 KB
Volume
16
Category
Article
ISSN
0925-9635

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## Abstract A transmission electron microscopy (TEM) study, comparing homoepitaxial diamond layers grown on different substrate surface preparation states and crystallographic orientation is presented. Quality of epilayers grown on {111} cleaved surface and on {001} polished one is evaluated in ter