Further developments for 193 nm top surface imaging resist

✍ Scribed by D.W. Johnson; M.I. Egbe; C. Chen; Y. Liao; S. Dionisio; C.E. Crowley

• Book ID: 114155805
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 286 KB
• Volume: 41-42
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(98)00080-x