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Fundamental understanding and modeling of spin coating process: A review

✍ Scribed by Niranjan Sahu; B. Parija; S. Panigrahi

Book ID: 107678726
Publisher: Springer-Verlag
Year: 2009
Tongue: English
Weight: 323 KB
Volume: 83
Category: Article
ISSN: 0019-5480
DOI: 10.1007/s12648-009-0009-z

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