✦ LIBER ✦
Development of a new simulation model of spin coating process and its application to optimize the 450 mm wafer coating process
✍ Scribed by Jung-Yeul Jung; Yong Tae Kang; Junemo Koo
- Book ID
- 108142585
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 591 KB
- Volume
- 53
- Category
- Article
- ISSN
- 0017-9310
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