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Fundamental Gas Processes for the CVD Diamond Growth from H2/C2/H2/O2 and Ar/C2H2/O2 Mixtures

✍ Scribed by Benndorf, C. ;Schmidt, I. ;Joeris, P.

Publisher: John Wiley and Sons
Year: 1996
Tongue: English
Weight: 1012 KB
Volume: 154
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2211540103

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