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FTIR and electrical characterization of a-Si:H layers deposited by PECVD at different boron ratios

✍ Scribed by A. Orduña-Diaz; C.G. Treviño-Palacios; M. Rojas-Lopez; R. Delgado-Macuil; V.L. Gayou; A. Torres-Jacome


Book ID
108215775
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
284 KB
Volume
174
Category
Article
ISSN
0921-5107

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