Frequency dependent dielectric properties and electrical conductivity of platinum silicide/Si contact structures with diffusion barrier

✍ Scribed by I.M. Afandiyeva; M.M. Bülbül; Ş. Altındal; S. Bengi

• Book ID: 113797863
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 648 KB
• Volume: 93
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.05.041