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Fracture toughness of brittle foams

โœ Scribed by Huang, J.S.; Gibson, L.J.


Book ID
120282766
Publisher
Elsevier Science
Year
1991
Weight
726 KB
Volume
39
Category
Article
ISSN
0956-7151

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Fracture toughness characterization of b
โœ L.S. Fan; R.T. Howe; R.S. Muller ๐Ÿ“‚ Article ๐Ÿ“… 1990 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 743 KB

This paper describes the design and fabrication of a series of test structures for measuring the fracture toughness of brittle thin films, with application to low-pressure chemical-vapor-deposited (LPCVD) Si3N4 and low-stress, silicon-rich LPCVD SixNy. Crack-initiating features are patterned in clam