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Fracture toughness measurement of thin-film silicon

✍ Scribed by T. ANDO; X. LI; S. NAKAO; T. KASAI; H. TANAKA; M. SHIKIDA; K. SATO

Book ID
109014107
Publisher
John Wiley and Sons
Year
2005
Tongue
English
Weight
225 KB
Volume
28
Category
Article
ISSN
8756-758X

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