✦ LIBER ✦

Formation of titanium silicides by titanium deposition onto silicon with simultaneous self-ion bombardment

✍ Scribed by I.V. Gusev; V.I. Chapljuk; V.P. Belevsky

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Resistivities of titanium nitride films

✍ Yokota, Katsuhiro; Nakamura, Kazuhiro; Kasuya, Tomohiko; Mukai, Katsuhisa; Ohnis 📂 Article 📅 2004 🏛 Institute of Physics 🌐 English ⚖ 394 KB

Ion beam current dependence of compositi

✍ Katsuhiro Yokota; Tomohiko Kasuya; Kazuhiro Nakamura; Masami Ohnishi; Fumiyoshi 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 122 KB

Influence of the diluting gas on the for

✍ Norihide Nishida; Hitoshi Kawasaki; Yutaka Nakayama 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 273 KB