Formation of TiO2 and ZrO2 Nanotubes Using Atomic Layer Deposition with Ultraprecise Control of the Wall Thickness

✍ Scribed by H. Shin; D.-K. Jeong; J. Lee; M. M. Sung; J. Kim

• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 180 KB
• Volume: 16
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200306296