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Formation of thin films by the treatment of amorphous titania with H2O2

โœ Scribed by Matsuo, Kaori; Takeshita, Toshihiro; Nakano, Katsuyuki

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
228 KB
Volume
99
Category
Article
ISSN
0022-0248

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The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi