Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow

✍ Scribed by V. V. Uglov; V. M. Anishchik; V. V. Astashynski; V. M. Astashynski; S. I. Ananin; V. V. Askerko; E. A. Kostyukevich; A. M. Kuz’mitski; N. T. Kvasov; A. L. Danilyuk

• Book ID: 110128376
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2001
• Tongue: English
• Weight: 227 KB
• Volume: 74
• Category: Article
• ISSN: 0021-3640
• DOI: 10.1134/1.1413553