Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows

✍ Scribed by V.M. Astashynski; S.I. Ananin; A.S. Emelyanenko; E.A. Kostyukevich; A.M. Kuzmitzky; S.P. Zhvavy; V.V. Uglov

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 716 KB
• Volume: 253
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2006.03.023