Formation of sub-micrometer polycrystalline-SiGe thin-film transistors by using a thinned channel layer

✍ Scribed by Miin-Horng Juang; C.W. Chang; C.W. Huang; J.L. Wang; D.C. Shye; C.C. Hwang; S.L. Jang

• Book ID: 108271762
• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 607 KB
• Volume: 54
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/j.sse.2009.10.015