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Formation of neon induced cavities in silicon by plasma based ion implantation

✍ Scribed by S. Peripolli; L. Amaral; E. Oliviero; M.L. David; M.F. Beaufort; J.F. Barbot; L. Pichon; M. Drouet; P.F.P. Fichtner; S.E. Donnelly

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