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Formation of nanostructure on surface of SiC by laser radiation

✍ Scribed by Medvid, A. ;Berzina, B. ;Trinkler, L. ;Fedorenko, L. ;Lytvyn, P. ;Yusupov, N. ;Yamaguchi, T. ;Sirghi, L. ;Aoyama, M.

Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
304 KB
Volume
195
Category
Article
ISSN
0031-8965

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## Abstract Nanocrystals of cubic silicon carbide (SiC) are formed using laser‐assisted gas‐phase synthesis. A CO~2~ laser beam is mechanically chopped to obtain pulsed infrared (IR) excitation. Silane (SiH~4~) and acetylene (C~2~H~2~) have been used as precursors. The SiC particles formed adopt th