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Formation of nanodots on oblique ion sputtered InP surfaces

✍ Scribed by T. Som; T.K. Chini; Y.S. Katharia; S. Tripathy; D. Kanjilal


Book ID
108064130
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
495 KB
Volume
256
Category
Article
ISSN
0169-4332

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We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O ΓΎ 2 beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38Β°and 44Β°incidence with ion current density of 100 lA cm Γ€2 . At 56