Self-organized nanodot formation on InP(
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S.K. Tan; R. Liu; C.H. Sow; A.T.S. Wee
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Article
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2006
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Elsevier Science
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English
β 488 KB
We demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O ΓΎ 2 beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38Β°and 44Β°incidence with ion current density of 100 lA cm Γ2 . At 56