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Formation of Microstructure in SiO 2 Thin Film by a Femtosecond Laser Pulse

✍ Scribed by Kawamura, Ken-ichi; Motomitsu, Eiji; Hirano, Masahiro; Hosono, Hideo

Book ID
126825057
Publisher
Institute of Pure and Applied Physics
Year
2002
Tongue
English
Weight
186 KB
Volume
41
Category
Article
ISSN
0021-4922

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The ability to machine very small features in a material has a wide range of applications in industry. We ablated holes into thin ΓΏlm of 100 nm thickness made from various metals by femtosecond pulsed laser ablation. Using a Ti:Sapphire laser which supplies a laser pulse of 150 fs duration at centra