Formation of locally aluminum-doped p-type silicon regions by in-line high-rate evaporation

✍ Scribed by Christoph Mader; Robert Bock; Jens Müller; Jan Schmidt; Rolf Brendel

• Book ID: 116425654
• Publisher: Elsevier
• Year: 2011
• Weight: 452 KB
• Volume: 8
• Category: Article
• ISSN: 1876-6102
• DOI: 10.1016/j.egypro.2011.06.176