Formation of highly aluminum-doped p-type silicon regions by in-line high-rate evaporation

✍ Scribed by Christoph Mader; Robert Bock; Jan Schmidt; Rolf Brendel

• Book ID: 108265712
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 377 KB
• Volume: 95
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/j.solmat.2011.01.039