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Formation of iridium silicides from Ir thin films on Si substrates

✍ Scribed by Petersson, S.; Baglin, J.; Hammer, W.; d’Heurle, F.; Kuan, T. S.; Ohdomari, I.; de Sousa Pires, J.; Tove, P.


Book ID
120219653
Publisher
American Institute of Physics
Year
1979
Tongue
English
Weight
948 KB
Volume
50
Category
Article
ISSN
0021-8979

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