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Formation of intermetallic layers at high intensity ion implantation

✍ Scribed by E.V. Kozlov; A.I. Ryabchikov; Yu.P. Sharkeev; I.B. Stepanov; S.V. Fortuna; D.O. Sivin; I.A. Kurzina; T.S. Prokopova; I.A. Mel'nik

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