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Formation of heavily doped n-type layers in GaAs by multiple ion implantation

โœ Scribed by E. B. Stoneham; G. A. Patterson; J. M. Gladstone


Book ID
112822183
Publisher
Springer US
Year
1980
Tongue
English
Weight
417 KB
Volume
9
Category
Article
ISSN
0361-5235

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