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Formation of Ge nanocrystals in amorphous GeOx, and SiGeOx alloy films

✍ Scribed by M. Zacharias; J. Bläsing; M. Löhmann; J. Christen

Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
600 KB
Volume
278
Category
Article
ISSN
0040-6090

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Germanium nanocrystals immersed in amorphous SiO x matrix have been synthesized by r.f. co-sputter deposition of Ge and quartz with post-growth annealing at 600-900 °C. The structures of the Ge nanocrystals and SiO x matrix have been studied with x-ray diffraction, high-resolution transmission elect