Formation of epitaxial cobalt silicide films on (1 0 0) Si using Co/Ti, Co/Nb, and Co/Hf bilayers

✍ Scribed by Youngjae Kwon; Chongmu Lee

• Book ID: 114194790
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 450 KB
• Volume: 63
• Category: Article
• ISSN: 0254-0584
• DOI: 10.1016/s0254-0584(99)00211-4