✦ LIBER ✦
Enhanced growth of low-resistivity cobalt silicide by using a Co/Au/Co trilayer film on Si0.8Ge0.2 virtual substrate
✍ Scribed by S.L. Cheng; H.Y. Chen; S.W. Lee
- Book ID
- 108060524
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 828 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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