Formation of cubic tantalum nitride by heating hexagonal tantalum nitride in a nitrogen-argon plasma jet

✍ Scribed by O. Matsumoto; M. Konuma; Y. Kanzaki

• Book ID: 116013115
• Publisher: Elsevier Science
• Year: 1978
• Weight: 164 KB
• Volume: 60
• Category: Article
• ISSN: 0022-5088
• DOI: 10.1016/0022-5088(78)90101-7