Studies of the mechanism of boron nitride thin-film formation by means of nitrogen-argon gas mixture plasma jet

✍ Scribed by Yasushi Takakura; Shigeru Ono; Shinriki Teii

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 633 KB
• Volume: 120
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/(sici)1520-6416(199709)120:4<1::aid-eej1>3.0.co;2-c