Formation of thin Cu2S (chalcocite) film
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Article
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1980
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Elsevier Science
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English
⚖ 162 KB
Classified abstracts 4523-4531 substrate are minimal. Photoresist images are not degraded, and subsequent lift-off is facilitated., S M Kane and K Y Ahn, J Yuc Sci Tecl~ol, 16 (2). 1979, 171-174.