Monitoring of TiSi/sub 2/ formation on n
Monitoring of TiSi/sub 2/ formation on narrow polycrystalline silicon lines using Raman spectroscopy
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E. Lim; G. Karunasiri; S. Chua; H. Wong; K. Pey; K. Lee
📂
Article
📅
1998
🏛
IEEE
🌐
English
⚖ 59 KB