Formation of cationic silicon clusters in a remote silane plasma and their contribution to hydrogenated amorphous silicon film growth

✍ Scribed by Kessels, W. M. M.; Leewis, C. M.; van de Sanden, M. C. M.; Schram, D. C.

• Book ID: 121012594
• Publisher: American Institute of Physics
• Year: 1999
• Tongue: English
• Weight: 505 KB
• Volume: 86
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.371324