The formation of Ti silicides has been examined in flash memories with 0.25 mm linewidth by X-ray diffraction, scanning electron microscopy, and transmission electron microscopy. It has been observed that, after the first rapid thermal process and the selective metal etch, there is no silicide on th
Formation of carbon particles from a gas phase: Nucleation phenomenon
β Scribed by J. Lahaye; G. Prado
- Publisher
- Springer Netherlands
- Year
- 1974
- Tongue
- English
- Weight
- 462 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0049-6979
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