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Formation of Boron-Based Films and Boron Nitride Layers by CVD of a Boron Ester

✍ Scribed by Priv.-Doz. Dr. Hermann Sachdev; Dr. Frank Müller; Prof. Dr. Stefan Hüfner

Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
571 KB
Volume
50
Category
Article
ISSN
0044-8249

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