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Formation of Aluminum Nitride Coatings at Low Temperature

✍ Scribed by Andrew Adaszko; Timothy Sercombe

Publisher: John Wiley and Sons
Year: 2010
Tongue: English
Weight: 311 KB
Volume: 12
Category: Article
ISSN: 1438-1656
DOI: 10.1002/adem.201000128

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