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Formation mechanisms of amorphous clusters in Mn+ implanted thin Al films

✍ Scribed by A. Seidel; C.A. Majid; G. Linker

Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
571 KB
Volume
69
Category
Article
ISSN
0038-1098

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The formation mechanism of a high density of nanovoids by annealing amorphous Al 2 O 3 thin films prepared by an electron beam deposition method was investigated. Transmission electron microscopy observations revealed that nanovoids $1-2 nm in size were formed by annealing amorphous Al 2 O 3 thin fi