Formation and characterization of cubic boron nitride films by an arc-like plasma-enhanced ion plating method

✍ Scribed by T. Ikeda; T. Satou; H. Satoh

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 712 KB
• Volume: 50
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/0257-8972(91)90189-4