7219. Formation of cubic boron nitride films by arc-like plasma-enhanced ion plating method: T Ikeda et al,J Vac Sci Technol, A8, 1990, 3168–3174

• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 144 KB
• Volume: 42
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(91)91026-k