๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

For a new educational strategy for ULSI microelectronics

โœ Scribed by Georges Kamarinos


Book ID
108027180
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
593 KB
Volume
199
Category
Article
ISSN
0921-5093

No coin nor oath required. For personal study only.


๐Ÿ“œ SIMILAR VOLUMES


Excimer lithography for ULSI
โœ A. Miyaji; K. Suzuki; A. Tanimoto ๐Ÿ“‚ Article ๐Ÿ“… 1993 ๐Ÿ› Springer ๐ŸŒ English โš– 779 KB

A brief review of excimer lithography for ULSI is presented with an emphasis on the recent progress made in KrF excimer stepper technology. In particular, the types of projection optics, excimer laser and the related performance of steppers are explained in detail. The resist patterns obtained with