Focused ion beams in microelectronic fabrication: John A. Doherty, Bill W. Ward and Edwin M. Kellogg IEEE Trans. Components Hybrids Mfg Technol Chmt-6 (3), 329 (September 1983)

• Book ID: 104157347
• Publisher: Elsevier Science
• Year: 1985
• Tongue: English
• Weight: 192 KB
• Volume: 16
• Category: Article
• ISSN: 0026-2692
• DOI: 10.1016/s0026-2692(85)80167-1

✦ Synopsis

morphology and vehicle chemistry contribute to excellent resolution of better than 125 p-m (5 mil) lines and spaces over alumina or dielectric. Two types of gold compositions, oxide-bonded and mixed-bonded, are discussed in detail. Extensive data are presented on resolution, thickness, coverage, wire bonding, dielectric and resistor compatibilities and processing latitude.