Focused ion beams in microelectronic fabrication : John A. Doherty, Bill W. Ward and Edwin M. Kellogg. IEEE Trans. Components Hybrids Mfg Technol.Chmt-6 (3), 329 (September 1983)

Focused ion beams in microelectronic fab

Focused ion beams in microelectronic fabrication: John A. Doherty, Bill W. Ward and Edwin M. Kellogg IEEE Trans. Components Hybrids Mfg Technol Chmt-6 (3), 329 (September 1983)

📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 192 KB

morphology and vehicle chemistry contribute to excellent resolution of better than 125 p-m (5 mil) lines and spaces over alumina or dielectric. Two types of gold compositions, oxide-bonded and mixed-bonded, are discussed in detail. Extensive data are presented on resolution, thickness, coverage, wir