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Focused ion beam sputtering yield measurements for cobalt ions on silicon and related materials

✍ Scribed by P. Schneider; L. Bischoff; J. Teichert; E. Hesse

Book ID: 113287944
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 405 KB
Volume: 117
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(96)00273-x

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