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Focused ion beam preparation of samples for X-ray nanotomography

✍ Scribed by Lombardo, Jeffrey J. ;Ristau, Roger A. ;Harris, William M. ;Chiu, Wilson K. S.

Book ID
117860141
Publisher
International Union of Crystallography
Year
2012
Tongue
English
Weight
745 KB
Volume
19
Category
Article
ISSN
0909-0495

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Sample preparation using focused ion beam (FIB) for transmission Electron Microscopy (TEM) analysis was reviewed. Improving the quality of FIB prepared TEM sample has been an issue in the past. A specific site cross-sectional sample preparation method has been developed using FIB milling for TEM cha