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Focused ion beam preparation of inclined planes in semiconductor materials

✍ Scribed by B Khamsehpour; ST Davies


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
496 KB
Volume
47
Category
Article
ISSN
0042-207X

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Technique for preparation and characteri
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## Abstract The surface properties of materials are believed to control most of the biological reactions toward implanted materials. To study the surface structure, elemental distribution, and morphology, using transmission electron microscopy (TEM) techniques, thin foils of the surface (in cross‐s